JPH01107128U - - Google Patents

Info

Publication number
JPH01107128U
JPH01107128U JP55088U JP55088U JPH01107128U JP H01107128 U JPH01107128 U JP H01107128U JP 55088 U JP55088 U JP 55088U JP 55088 U JP55088 U JP 55088U JP H01107128 U JPH01107128 U JP H01107128U
Authority
JP
Japan
Prior art keywords
chamber
wafer
processing apparatus
gas
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP55088U priority Critical patent/JPH01107128U/ja
Publication of JPH01107128U publication Critical patent/JPH01107128U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP55088U 1988-01-08 1988-01-08 Pending JPH01107128U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55088U JPH01107128U (en]) 1988-01-08 1988-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55088U JPH01107128U (en]) 1988-01-08 1988-01-08

Publications (1)

Publication Number Publication Date
JPH01107128U true JPH01107128U (en]) 1989-07-19

Family

ID=31199680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55088U Pending JPH01107128U (en]) 1988-01-08 1988-01-08

Country Status (1)

Country Link
JP (1) JPH01107128U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03153884A (ja) * 1989-11-10 1991-07-01 Nec Corp エッチング装置およびエッチング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03153884A (ja) * 1989-11-10 1991-07-01 Nec Corp エッチング装置およびエッチング方法

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